The automated high-end testing system E-LIT allows non-contact defect inspection on semiconductor materials, electronic components, and electronic circuits.

Advantages of the Modular Test Bench
- Online lock-in measurement with highest sensitivity
- Integration of different camera technology with detector formats up to (1,920 × 1,536) IR pixels
- Complete and detailed microscopy analysis
- Geometrical resolution up to 1.3 µm with microscopic lenses
- Thermal resolution in the microkelvin range
- Multi-layer analysis
- Automatic scanning of larger samples due to precision mechanics